Method and apparatus for gating photomask contamination
View Patent ↗A photomask is provided that includes a transparent substrate, a mask pattern formed on a first area of the substrate, the mask pattern having one or more openings that allow light radiation to pass through and having one or more features formed of a first material, and an inspection structure formed on a second area of the substrate different from the first area, the inspection structure being formed of a second material different from the first material.
1. A photomask, comprising:
a transparent substrate;
a mask pattern to be transferred onto a semiconductor wafer formed on a first area of the substrate, the mask pattern having one or more openings that allow light radiation to pass through and having one or more features formed of a first material; and
an inspection structure formed on a second area of the substrate different from the first area, the inspection structure being formed of a second, hydrophilic material different from the first material;
wherein the second area of the substrate is positioned so that it is not transferred when the mask pattern on the first area of the substrate is transferred onto the semiconductor wafer.
2. The photomask of claim 1 , wherein the second material includes a porous carbon material.
3. The photomask of claim 1 , wherein the second material includes titanium dioxide (TiO 2 ).
4. The photomask of claim 1 , wherein the second material includes silver.
5. The photomask of claim 1 , wherein the first material is one of chromium and a metal silicide.
6. The photomask of claim 1 , wherein the inspection structure is configured to determine a contamination status of the photomask.
7. A method for monitoring a contamination status of a photomask, the method comprising:
providing a photomask that includes:
a substrate;
a mask pattern to be transferred onto a semiconductor wafer formed directly on a first area of the substrate, the mask pattern having one or more openings that allow light radiation to pass through and having features formed of a first material; and
an inspection structure formed directly on a second area of the substrate different from the first area, the inspection structure being of a second material different from the first material and being positioned so that the inspection structure is not transferred when the mask pattern is transferred onto the semiconductor wafer;
inspecting the inspection structure to determine whether there is a precipitate proximate to or in contact with the inspection structure; and
cleaning the photomask if it is determined that there is the precipitate proximate to or in contact with the inspection structure.
8. The method of claim 7 , wherein the second material includes one of a hydrophilic material, a porous carbon material, silver, titanium dioxide (TiO 2 ), and combinations thereof.
9. The method of claim 7 , wherein the first material includes one of chromium (Cr) and a metal silicide.
10. The method of claim 7 , wherein the inspecting is performed without inspecting the mask pattern in the first area.
11. The method of claim 7 , wherein the inspecting is performed by an optical microscope.
12. The method of claim 7 , including performing a photolithography process with the photomask to pattern a semiconductor wafer if it is determined that there is no precipitate proximate to or in contact with the inspection structure.
13. The method of claim 7 , including re-inspecting the inspection structure after cleaning the photomask.
14. A photomask, comprising:
a transparent substrate;
an absorption layer formed on the substrate and having a pattern to be transferred onto a semiconductor wafer; and
a reference structure formed on the substrate and formed of a material different from the absorption layer, the reference structure being associated with a determination of a contamination status of the photomask and being positioned on the photomask so that the reference structure is not transferred when the pattern is transferred.
15. The photomask of claim 14 , wherein the reference structure includes one of a hydrophilic material, a porous carbon material, a silver, a titanium dioxide, and combinations thereof.
16. The photomask of claim 5 , wherein the absorption layer includes one of chromium and a metal silicide.
17. The photomask of claim 16 , wherein the transparent substrate includes one of a fused silica, a fused quartz, a glass, and carbon fluoride (CaF 2 ).
18. The photomask of claim 14 , wherein the reference structure is located outside of an area of the pattern of the absorption layer.
19. The photomask of claim 14 , further comprising:
a frame coupled to the substrate; and
a pellicle coupled to the frame;
wherein the absorption layer and reference structure are located within a region enclosed by the frame and pellicle.