Patent Assignment
Reel/Frame 021532/0973
Assignment of Assignor's Interest
Recorded: 2008-09-04
Pages: 3
Assignors
TAKENAGA, YUICHI
Executed: 2008-08-19
YAMAGUCHI, TATSUYA
Executed: 2008-08-07
WANG, WENLING
Executed: 2008-08-19
TAKAHASHI, TOSHIHIKO
Executed: 2008-08-07
YONEZAWA, MASATO
Executed: 2008-08-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System, Control Method for Substrate Processing Apparatus and Program Stored on Medium