Patent Assignment
Reel/Frame 021542/0022
Assignment of Assignor's Interest
Recorded: 2008-09-11
Pages: 3
Assignor
NISHIZUKA, TETSUYA
Executed: 2008-01-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method