Patent Assignment
Reel/Frame 021564/0446
Assignment of Assignor's Interest
Recorded: 2008-09-09
Pages: 3
Assignor
YAMAGUCHI, HIDETO
Executed: 2008-09-02
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Temperature Control Method, Method of Obtaining a Temperature Correction Value, Method of Manufacturing a Semiconductor Device and Substrate Treatment Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.