Patent Assignment
Reel/Frame 021631/0306
Assignment of Assignor's Interest
Recorded: 2008-10-02
Pages: 4
Assignors
NAKASHIMA, SADAO
Executed: 2008-09-09
MAEDA, TAKAHIRO
Executed: 2008-09-17
MAEDA, KIYOHIKO
Executed: 2008-09-09
KAMEDA, KENJI
Executed: 2008-09-09
TAKASAWA, YUSHIN
Executed: 2008-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device Including Removal of Deposits from Process Chamber and Supply Portion
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.