Patent Assignment
Reel/Frame 021753/0874
Assignment of Assignor's Interest
Recorded: 2008-10-29
Pages: 2
Assignor
YAMADA, TOMOYUKI
Executed: 2008-10-20
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.