Patent Assignment
Reel/Frame 021870/0941
Assignment of Assignor's Interest
Recorded: 2008-10-20
Pages: 4
Assignors
YAMAGUCHI, HIDETO
Executed: 2008-09-24
JOHO, YASUHIRO
Executed: 2008-09-24
MATSUDA, MITSUHIRO
Executed: 2008-09-24
KOYAMA, YOSHITAKA
Executed: 2008-09-24
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing System and Operation Inspecting Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.