Patent Assignment
Reel/Frame 021954/0671
Assignment of Assignor's Interest
Recorded: 2008-12-10
Pages: 8
Assignors
DINGER, UDO
Executed: 2004-11-16
EISERT, FRANK
Executed: 2004-11-17
STACKLIES, SIEGFRIED
Executed: 2004-10-27
WEISER, MARTIN
Executed: 2004-11-03
SEITZ, GUENTHER
Executed: 2004-11-19
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mirror for Use in a Projection Exposure Apparatus
Patent:
7,481,543 →
Application:
11/523,396 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.