Patent Assignment
Reel/Frame 021971/0366
Assignment of Assignor's Interest
Recorded: 2008-12-12
Pages: 5
Assignor
ASML US, INC.
Executed: 2003-09-15
Assignee
ASML HOLDING N.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Properties
(2)
Photoresist Coating Process Control with Solvent Vapor Sensor
Patent:
6,027,760 →
Application:
08/987,179 →
Method and Apparatus for Resolving Conflicts in a Substrate Processing System
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Change of Name & Merger
Dec 11, 2003
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 014863/0715 →
Change of Name
Aug 8, 2008
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 021360/0088 →
Merger
Aug 8, 2008
From: ASML US, LLC
To: ASML US, INC.
Reel/Frame 021360/0092 →
Merger
Aug 8, 2008
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 021360/0189 →