Patent Assignment
Reel/Frame 021975/0204
Assignment of Assignor's Interest
Recorded: 2008-12-11
Pages: 5
Assignors
INMAN, RONALD S.
Executed: 2008-12-11
SOULET, AXEL
Executed: 2008-12-10
MARC, JEAN-LOUIS
Executed: 2008-11-06
Assignee
AIR LIQUIDE ELECTRONICS U.S. LP
9101 LBJ FREEWAY, 9101 LBJ FREEWAY, DALLAS, TEXAS, 75243
Covered Properties
(2)
Methods for Checking and Calibrating Concentration Sensors in a Semiconductor Processing Chamber
Method to Check the Precision of and to Calibrate a Sensor While Maintaining Liquid in a Closed System
Application:
61/013,142 →
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.