Patent Assignment
Reel/Frame 021975/0209
Assignment of Assignor's Interest
Recorded: 2008-12-11
Pages: 3
Assignee
AMERICAN AIR LIQUIDE, INC.
46409 LANDING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Methods for Checking and Calibrating Concentration Sensors in a Semiconductor Processing Chamber
Method to Check the Precision of and to Calibrate a Sensor While Maintaining Liquid in a Closed System
Application:
61/013,142 →
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.