Patent Assignment
Reel/Frame 022001/0836
Assignment of Assignor's Interest
Recorded: 2008-12-18
Pages: 3
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, NORTH BILLERICA, MASSACHUSETTS, 20007-5118
Covered Property
(1)
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
Application:
11/648,091 →
Publication:
US 2007/0181830
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 29, 2006
From: HORSKY, THOMAS N.
To: SEMEQUIP, INC.
Reel/Frame 018762/0253 →
Security Agreement
Jul 28, 2008
From: SEMEQUIP, INC.
To: TUNA INVESTMENTS, LLC, AS COLLATERAL AGENT
Reel/Frame 021301/0023 →
Release of Security Interest
Aug 13, 2008
From: TUNA INVESTMENTS, LLC, AS COLLATERAL AGENT
To: SEMEQUIP, INC.
Reel/Frame 021380/0018 →