Patent Assignment
Reel/Frame 022010/0934
Assignment of Assignor's Interest
Recorded: 2008-12-19
Pages: 3
Assignor
SMITH, NIGEL P.
Executed: 2008-12-17
Assignee
NANOMETRICS INCORPORATED
1550 BUCKEYE DRIVE, MILPITAS, CALIFORNIA, 95035-7418
Covered Property
(1)
Determining Overlay Error Using an in-Chip Overlay Target
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.