Patent Assignment
Reel/Frame 022199/0412
Assignment of Assignor's Interest
Recorded: 2009-02-03
Pages: 3
Assignor
HEIDRICH, KEVIN E.
Executed: 2008-12-19
Assignee
NANOMETRICS INCORPORATED
1550 BUCKEYE DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Determining Overlay Error Using an in-Chip Overlay Target
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.