Patent Assignment
Reel/Frame 022159/0939
Assignment of Assignor's Interest
Recorded: 2009-01-27
Pages: 4
Assignors
OKAMURA, KOUJI
Executed: 2007-04-09
TOMITA, HIROSHI
Executed: 2007-04-09
IWANAGA, SHUJI
Executed: 2007-04-09
ARAKI, SHINICHIRO
Executed: 2007-04-09
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method of Detecting Extraneous Matter on Heat Processing Plate, Heat Processing Apparatus, Program, and Computer-Readable Recording Medium with Program Recorded Thereon