Patent Assignment
Reel/Frame 022213/0769
Assignment of Assignor's Interest
Recorded: 2009-01-30
Pages: 4
Assignors
SHIBAGAKI, MASAMI
Executed: 2009-01-21
DOI, HIROSHI
Executed: 2009-01-23
EGAMI, AKIHIRO
Executed: 2009-01-21
SASAKI, TOSHIAKI
Executed: 2009-01-23
HASEGAWA, SHINYA
Executed: 2009-01-21
Assignees
CANON ANELVA ENGINEERING CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Substrate Heating Apparatus, Heating Method, and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.