Patent Assignment
Reel/Frame 022220/0734
Assignment of Assignor's Interest
Recorded: 2009-02-06
Pages: 5
Assignors
MELZER, FRANK
Executed: 2009-02-02
KWAN, YIM-BUN PATRICK
Executed: 2009-02-02
XALTER, STEFAN
Executed: 2009-02-02
FIOLKA, DAMIAN
Executed: 2009-02-03
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical System for Semiconductor Lithography
Application:
12/337,262 →
Publication:
US 2009/0135395
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.