Patent Application
Utility
App. No. 12/337,262
· Confirmation No. 3362
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-06-13 | ABN |
Abandonment | 2 | View | |
| 2012-06-01 | EABN |
Letter Express Abandonment of the application | 1 | View | |
| 2012-06-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-11-14 | CTNF |
Non-Final Rejection | 9 | View | |
| 2011-11-14 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-11-14 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2011-11-14 | FWCLM |
Index of Claims | 1 | View | |
| 2011-11-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2011-11-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-11-14 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2009-05-28 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2009-02-20 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-02-20 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-02-17 | FRPR |
Certified Copy of Foreign Priority Application | 27 | View | |
| 2009-02-09 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2009-02-09 | OATH |
Oath or Declaration filed | 4 | View | |
| 2009-02-09 | PA.. |
Power of Attorney | 2 | View | |
| 2009-02-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-02-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-01-13 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2009-01-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-12-17 | TRNA |
Transmittal of New Application | 2 | View | |
| 2008-12-17 | ADS |
Application Data Sheet | 6 | View | |
| 2008-12-17 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-12-17 | FOR |
Foreign Reference | 18 | View | |
| 2008-12-17 | FOR |
Foreign Reference | 39 | View | |
| 2008-12-17 | FR TRANS |
Translation of Foreign Priority Documents | 77 | View | |
| 2008-12-17 | SPEC |
Specification | 38 | View | |
| 2008-12-17 | CLM |
Claims | 5 | View | |
| 2008-12-17 | ABST |
Abstract | 1 | View | |
| 2008-12-17 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2008-12-17 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2008-12-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-12-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-12-17 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Frank Melzer
Utzmemmingen, GERMANY
Yim-Bun Patrick Kwan
Aalen, GERMANY
Stefan Xalter
Oberkochen, GERMANY
Damian Fiolka
Oberkochen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G02B7/14
G02B7/023
G02B7/102
G03F7/70108
G03F7/70116
G03F7/70825
Prosecution
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2882
- Customer No.
- 26161
- Docket No.
- 22942-0027001 / ZS 7340PC
- Confirmation No.
- 3362
Foreign Priority
10 2006 038 455.5
·
2006-08-16
·
GERMANY
Publication
- Pub. No.
- US20090135395A1
- Pub. Date
- 2009-05-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-02-06
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Quick Facts
- App. No.
- 12/337,262
- Filed
- 2008-12-17
- Pub. No.
- US20090135395A1
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2882
External Links