Assignment of Assignor's Interest

Recorded: 2009-02-13 Pages: 3

Assignors

IINO, TOMOHISA

Executed: 2009-02-02

FUKUMAKI, NAOMI

Executed: 2009-02-02

KATO, YOSHITAKE

Executed: 2009-02-02

Assignee

NEC ELECTRONICS CORPORATION

1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN

Covered Property (1)

Atomic Layer Deposition Apparatus

Application: 12/370,648 →

Publication: US 2009/0217873

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.