Patent Assignment
Reel/Frame 022300/0857
Assignment of Assignor's Interest
Recorded: 2009-02-24
Pages: 3
Assignor
SHIBAGAKI, MASAMI
Executed: 2009-02-16
Assignee
CANON ANELVA ENGINEERING CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, JAPAN
Covered Property
(1)
Substrate Heating Apparatus, Semiconductor Device Manufacturing Method, and Semiconductor Device
Application:
12/391,345 →
Publication:
US 2009/0218579
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.