Patent Assignment
Reel/Frame 022356/0164
Assignment of Assignor's Interest
Recorded: 2009-03-03
Pages: 3
Assignors
TORII, HIROOMI
Executed: 2009-02-06
NISHIDA, HIROAKI
Executed: 2009-02-06
KANEKO, HIROYUKI
Executed: 2009-02-06
DATE, MISAO
Executed: 2009-02-06
MITSUYA, TAKASHI
Executed: 2009-02-06
NAKAMURA, TAKAMASA
Executed: 2009-02-06
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Operating Substrate Processing Apparatus and Substrate Processing Apparatus