Patent Assignment
Reel/Frame 022536/0003
Assignment of Assignor's Interest
Recorded: 2009-04-01
Pages: 3
Assignors
SHIRAI, YURIKO
Executed: 2009-03-09
HIROSAKI, TAKAKO
Executed: 2009-03-18
MASUJIMA, MASAHIRO
Executed: 2009-03-16
SAWANO, ATSUSHI
Executed: 2009-03-09
KOSHIYAMA, JUN
Executed: 2009-03-16
Assignee
TOKYO OHKA KOGYO CO., LTD.
150, NAKAMARUKO, NAKAHARA-KU, KAWASAKI-SHI, KANAGAWA 211-0012, JAPAN
Covered Property
(1)
Anti-Reflection Film Forming Material, and Method for Forming Resist Pattern Using the Same