Patent Assignment
Reel/Frame 022547/0285
Assignment of Assignor's Interest
Recorded: 2009-04-15
Pages: 3
Assignors
ITAGAKI, KATSUNORI
Executed: 2009-03-31
UCHIYAMA, TOMOO
Executed: 2009-03-25
HARI, YASUKO
Executed: 2009-03-24
SAITO, HIROAKI
Executed: 2009-03-25
CHIBA, TOSHINOBU
Executed: 2009-03-19
Assignee
CANON ANELVA CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Sputtering Cathode, Sputtering Apparatus Provided with Sputtering Cathode, Film-Forming Method, and Method for Manufacturing Electronic Device