Patent Assignment
Reel/Frame 022609/0660
Assignment of Assignor's Interest
Recorded: 2009-04-29
Pages: 2
Assignors
SHISHIDO, CHIE
Executed: 2009-02-02
TANAKA, MAKI
Executed: 2009-01-30
MIYAMOTO, ATSUSHI
Executed: 2009-02-02
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Scanning Electron Microscope System and Method for Measuring Dimensions of Patterns Formed on Semiconductor Device by Using the System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.