Patent Assignment
Reel/Frame 023002/0147
Assignment of Assignor's Interest
Recorded: 2009-07-24
Pages: 2
Assignor
HITACHI, LTD.
Executed: 2009-06-29
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Scanning Electron Microscope System and Method for Measuring Dimensions of Patterns Formed on Semiconductor Device by Using the System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.