Patent Assignment
Reel/Frame 022700/0575
Assignment of Assignor's Interest
Recorded: 2009-05-19
Pages: 2
Assignors
KITADA, HIROHO
Executed: 2009-02-17
NAKAMOTO, KAZUNORI
Executed: 2009-02-17
SAKAI, YOSUKE
Executed: 2009-02-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma processing apparatus and operation method thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.