Patent Assignment
Reel/Frame 022819/0598
Assignment of Assignor's Interest
Recorded: 2009-06-12
Pages: 3
Assignor
IIZUKA, HACHISHIRO
Executed: 2009-06-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Baffle Plate and Substrate Processing Apparatus