Patent Assignment
Reel/Frame 022821/0283
Assignment of Assignor's Interest
Recorded: 2009-06-03
Pages: 3
Assignors
MIYAZAKI, MITSURU
Executed: 2009-05-20
KATSUOKA, SEIJI
Executed: 2009-05-20
MATSUDA, NAOKI
Executed: 2009-05-20
KUNISAWA, JUNJI
Executed: 2009-05-20
KOBAYASHI, KENICHI
Executed: 2009-05-20
SOTOZAKI, HIROSHI
Executed: 2009-05-20
SHINOZAKI, HIROYUKI
Executed: 2009-05-20
NABEYA, OSAMU
Executed: 2009-05-20
MORISAWA, SHINYA
Executed: 2009-05-20
OGAWA, TAKAHIRO
Executed: 2009-05-20
MAKINO, NATSUKI
Executed: 2009-05-20
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method