Patent Assignment
Reel/Frame 022903/0648
Assignment of Assignor's Interest
Recorded: 2009-07-01
Pages: 5
Assignors
PATRA, MICHAEL
Executed: 2009-05-29
DEGUENTHER, MARKUS
Executed: 2009-06-18
LAYH, MICHAEL
Executed: 2009-06-04
WANGLER, JOHANNES
Executed: 2009-06-02
MAUL, MANFRED
Executed: 2009-06-16
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optics for Projection Microlithography and Related Methods
Application:
12/464,730 →
Publication:
US 2009/0262324
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.