Patent Application
Utility
App. No. 12/464,730
· Confirmation No. 2155
ILLUMINATION OPTICS FOR PROJECTION MICROLITHOGRAPHY AND RELATED METHODS
Abandoned -- Failure to Respond to an Office Action
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-12-07 | ABN |
Abandonment | 3 | View | |
| 2012-05-24 | CTNF |
Non-Final Rejection | 14 | View | |
| 2012-05-24 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-05-24 | FWCLM |
Index of Claims | 2 | View | |
| 2012-05-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-05-24 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-01-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-01-19 | CLM |
Claims | 5 | View | |
| 2012-01-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2012-01-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-01-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-01-19 | XT/ |
Extension of Time | 1 | View | |
| 2012-01-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-09-26 | CTNF |
Non-Final Rejection | 13 | View | |
| 2011-09-26 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-09-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-09-26 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2011-09-26 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2011-09-26 | FWCLM |
Index of Claims | 2 | View | |
| 2009-10-22 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2009-07-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-07-13 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-07-06 | PA.. |
Power of Attorney | 2 | View | |
| 2009-07-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-07-01 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2009-07-01 | OATH |
Oath or Declaration filed | 4 | View | |
| 2009-07-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-07-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-26 | FRPR |
Certified Copy of Foreign Priority Application | 30 | View | |
| 2009-06-26 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-06-17 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-06-17 | SPEC |
Specification | 30 | View | |
| 2009-06-17 | CLM |
Claims | 8 | View | |
| 2009-06-17 | ABST |
Abstract | 1 | View | |
| 2009-06-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-12 | NT.INC.REPLY |
Notice of Incomplete Reply | 2 | View | |
| 2009-06-02 | A.PE |
Preliminary Amendment | 1 | View | |
| 2009-06-02 | SPEC |
Specification | 1 | View | |
| 2009-06-02 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2009-06-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-05-22 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-05-22 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2009-05-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2009-05-12 | ADS |
Application Data Sheet | 6 | View | |
| 2009-05-12 | A.PE |
Preliminary Amendment | 1 | View | |
| 2009-05-12 | CLM |
Claims | 5 | View | |
| 2009-05-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2009-05-12 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-05-12 | 371P |
Documents submitted with 371 (National Stage) Applications | 2 | View | |
| 2009-05-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-05-12 | FOR |
Foreign Reference | 17 | View | |
| 2009-05-12 | FOR |
Foreign Reference | 62 | View | |
| 2009-05-12 | FOR |
Foreign Reference | 34 | View | |
| 2009-05-12 | SPEC |
Specification | 27 | View | |
| 2009-05-12 | CLM |
Claims | 6 | View | |
| 2009-05-12 | ABST |
Abstract | 1 | View | |
| 2009-05-12 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2009-05-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-05-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2009-05-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-05-12 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Michael Patra
Oberkochen, GERMANY
Markus Deguenther
Aalen, GERMANY
Michael Layh
Aalen, GERMANY
Johannes Wangler
Koenigsbronn, GERMANY
Manfred Maul
Aalen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/68
G03F7/7085
G03F7/70116
Prosecution
- Examiner
- KAO, CHIH CHENG G
- Art Unit
- 2882
- Customer No.
- 26161
- Docket No.
- 21070-0035001
- Confirmation No.
- 2155
Foreign Priority
10 2006 054 746.2
·
2006-11-21
·
GERMANY
Publication
- Pub. No.
- US20090262324A1
- Pub. Date
- 2009-10-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-07-01
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 12/464,730
- Filed
- 2009-05-12
- Pub. No.
- US20090262324A1
- Examiner
- KAO, CHIH CHENG G
- Art Unit
- 2882
External Links