Patent Assignment
Reel/Frame 022953/0014
Assignment of Assignor's Interest
Recorded: 2009-07-13
Pages: 5
Assignors
LAUERHAAS, JEFFREY M.
Executed: 2009-06-15
COLLINS, JIMMY D.
Executed: 2009-06-21
GAST, TRACY A.
Executed: 2009-06-17
ROSE, ALAN D.
Executed: 2009-06-22
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Tools and Methods for Processing Microelectronic Workpieces Using Process Chamber Designs That Easily Transition Between Open and Closed Modes of Operation
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.