Patent Assignment
Reel/Frame 022994/0616
Assignment of Assignor's Interest
Recorded: 2009-07-23
Pages: 4
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Movable Body Apparatus, Exposure Apparatus and Optical System Unit, and Device Manufacturing Method