Patent Assignment
Reel/Frame 022999/0286
Assignment of Assignor's Interest
Recorded: 2009-07-23
Pages: 3
Assignor
EDELBERG, ERIK A.
Executed: 2009-04-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for High Aspect Ratio Dielectric Etch