Patent Assignment
Reel/Frame 022999/0455
Assignment of Assignor's Interest
Recorded: 2009-07-23
Pages: 8
Assignors
HUA, ZHONG QIANG
Executed: 2009-07-06
KAMATH, SANJAY
Executed: 2009-07-06
LEE, YOUNG S.
Executed: 2009-07-10
YIEH, ELLIE Y.
Executed: 2009-07-10
HUU LE, HIEN-MINH
Executed: 2009-07-06
PATEL, ANJANA M.
Executed: 2009-07-21
GONDHALEKAR, SUDHIR R.
Executed: 2009-07-06
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Remote Plasma Clean Process with Cycled High and Low Pressure Clean Steps