Patent Assignment
Reel/Frame 023020/0585
Assignment of Assignor's Interest
Recorded: 2009-07-29
Pages: 7
Assignors
BERRY, IVAN
Executed: 2009-03-04
ESCORCIA, ORLANDO
Executed: 2009-03-04
HAN, KEPING
Executed: 2009-03-15
HOU, JIANAN
Executed: 2009-03-05
LUO, SHIJIAN
Executed: 2009-03-04
WALDFRIED, CARLO
Executed: 2009-03-05
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Mediated Ashing Processes That Include Formation of a Protective Layer Before and/or During the Plasma Mediated Ashing Process
Application:
12/398,390 →
Publication:
US 2009/0277871
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →