Assignment of Assignor's Interest

Recorded: 2009-09-08 Pages: 2

Assignor

BENSON, ARNE

Executed: 2009-09-02

Assignee

FSI INTERNATIONAL, INC.

3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318

Covered Property (1)

System for Supplying Water Vapor in Semiconductor Wafer Treatment

Application: 12/555,502 →

Publication: US 2010/0124410

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.