Patent Assignment
Reel/Frame 029618/0179
Merger, Change of Name
Recorded: 2013-01-11
Pages: 95
Assignee
TEL FSI, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Properties
(16)
Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids
Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids
Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids
Apparatus for Removing Material from One or More Substrates
System for Supplying Water Vapor in Semiconductor Wafer Treatment
Application:
12/555,502 →
Publication:
US 2010/0124410
Process for Treatment of Substrates with Water Vapor or Steam
Liquid Aerosol Particle Removal Method
Application:
13/082,676 →
Publication:
US 2011/0180114
Wet Processing of Microelectronic Substrates with Controlled Mixing of Fluids Proximal to Substrate Surfaces
Application:
13/083,948 →
Publication:
US 2011/0259376
Methodologies for Rinsing Tool Surfaces in Tools Used to Process Microelectronic Workpieces
Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids
Process for Selectively Removing Nitride from Substrates
Acid Treatment Strategies Useful to Fabricate Microelectronic Devices and Precursors Thereof
Tools and Methods for Processing Microelectronic Workpieces Using Process Chamber Designs That Easily Transition Between Open and Closed Modes of Operation
Method of Removing Liquid from a Barrier Structure
Method and Apparatus for Treating a Workpiece with Arrays of Nozzles
Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids
Related Assignments
(18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 6, 2007
From: COLLINS, JIMMY D.; DEKRAKER, DAVID; GAST, TRACY A.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 019806/0804 →
Assignment of Assignor's Interest
Sep 8, 2009
From: BENSON, ARNE
To: FSI INTERNATIONAL, INC.
Reel/Frame 023202/0995 →
Assignment of Assignor's Interest
Jun 15, 2011
From: WAGENER, THOMAS J.; BUTTERBAUGH, JEFFERY W.; DEKRAKER, DAVID
To: FSI INTERNATIONAL, INC.
Reel/Frame 026464/0902 →
Assignment of Assignor's Interest
Jul 12, 2011
From: STIYER, MARK A.; DEKRAKER, DAVID
To: KAGAN BINDER, PLLC
Reel/Frame 026576/0918 →
Corrective Assignment to Correct the the Assignee Should Not Be Kagan Binder, Pllc 221 Main Street North Suite 200 Stillwater, Minnesota 55082 Previously Recorded on Reel 026576 Frame 0918. Assignor(S) Hereby Confirms the the Assignee Should Be Fsi International, Inc. 3455 Lyman Boulevard Chaska, Minnesota 55318.
Nov 16, 2011
From: STIVER, MARK A.; DEKRACKER, DAVID
To: FSI INTERNATIONAL, INC.
Reel/Frame 027235/0383 →
Assignment of Assignor's Interest
Feb 16, 2012
From: RATKOVICH, ANTHONY S.; BUTTERBAUGH, JEFFERY W.; BECKER, DAVID SCOTT
To: FSI INTERNATIONAL, INC.
Reel/Frame 027718/0728 →
Assignment of Assignor's Interest
Jun 15, 2012
From: DEKRAKER, DAVID
To: FSI INTERNATIONAL, INC.
Reel/Frame 028380/0955 →
Assignment via Employment Agreement
Aug 20, 2013
From: MEKIAS, KADER
To: FSI INTERNATIONAL, INC.
Reel/Frame 031049/0952 →
Assignment of Assignor's Interest
Aug 20, 2013
From: COLLINS, JIMMY D.; COOPER, SAMUEL A.; EPPES, JAMES M.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 031045/0846 →
Assignment of Assignor's Interest
Jan 7, 2014
From: COLLINS, JIMMY D.; COOPER, SAMUEL A.; EPPES, JAMES M.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 031908/0878 →
Assignment via Employment Agreement
Jan 7, 2014
From: MEKIAS, KADER
To: FSI INTERNATIONAL, INC.
Reel/Frame 031935/0157 →
Assignment of Assignor's Interest
Jan 10, 2014
From: COLLINS, JIMMY D.; DEKRAKER, DAVID; GAST, TRACY A.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 031940/0807 →
Assignment of Assignor's Interest
Jan 22, 2014
From: COLLINS, JIMMY D.; DEKRAKER, DAVID; GAST, TRACY A.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 032022/0204 →
Assignment of Assignor's Interest
Jan 22, 2014
From: COLLINS, JIMMY D.; DEKRAKER, DAVID; GAST, TRACY A.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 032022/0057 →
Assignment of Assignor's Interest
May 14, 2014
From: COLLINS, JIMMY D.; COOPER, SAMUEL A.; EPPES, JAMES M.; ROSE, ALAN D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 032887/0589 →
Assignment via Employment Agreement
May 14, 2014
From: MEKIAS, KADER
To: FSI INTERNATIONAL, INC.
Reel/Frame 032893/0544 →
Assignment of Assignor's Interest
Nov 24, 2014
From: DEKRAKER, DAVID; BUTTERBAUGH, JEFFERY W.; WILLIAMSON, RICHARD E.
To: FSI INTERNATIONAL, INC.
Reel/Frame 034252/0268 →
Conversion
Jul 30, 2020
From: TEL FSI, INC.
To: TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Reel/Frame 053366/0139 →