Patent Assignment
Reel/Frame 027718/0728
Assignment of Assignor's Interest
Recorded: 2012-02-16
Pages: 3
Assignors
RATKOVICH, ANTHONY S.
Executed: 2012-01-05
BUTTERBAUGH, JEFFERY W.
Executed: 2012-01-04
BECKER, DAVID SCOTT
Executed: 2012-01-04
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Process for Selectively Removing Nitride from Substrates
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.