Patent Assignment
Reel/Frame 026464/0902
Assignment of Assignor's Interest
Recorded: 2011-06-15
Pages: 4
Assignors
WAGENER, THOMAS J.
Executed: 2011-05-14
BUTTERBAUGH, JEFFERY W.
Executed: 2011-05-23
DEKRAKER, DAVID
Executed: 2011-06-01
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Wet Processing of Microelectronic Substrates with Controlled Mixing of Fluids Proximal to Substrate Surfaces
Application:
13/083,948 →
Publication:
US 2011/0259376
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.