Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
View Patent ↗The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
1. An apparatus for processing a microelectronic workpiece, comprising:
a) a processing chamber in which the workpiece is positioned during a treatment
b) a chuck positioned in the processing chamber for holding and supporting the workpiece;
c) a spraying mechanism configured to dispense a spray onto the workpiece, wherein the spraying mechanism comprises a bottom surface, a first side surface, and a second side surface, and
d) a barrier plate overlying the workpiece thereby defining a boundary of the processing chamber, said barrier plate comprising a first major surface facing the workpiece and a second major surface opposite the first major surface, wherein the second major surface comprises a pocket that the spraying mechanism fits into, wherein the spraying mechanism is positioned in the pocket, and wherein said pocket comprises:
i) a first portion of the second major surface that is in contact with and structurally supports the bottom surface of the spraying mechanism, wherein the first portion comprises at least one aperture through which spray from the spraying mechanism can pass through towards the workpiece;
ii) a second portion of the second major surface that is contact with and structurally supports the first side surface of the spraying mechanism; and
iii) a third portion of the second major surface that is in contact with and structurally supports the second side surface of the spraying mechanism; wherein the spraying mechanism and the barrier plate are separate components.
2. The apparatus of claim 1 , further comprising a retaining plate overlying the spraying mechanism and secured to the barrier plate so as to secure the spraying mechanism in the pocket.
3. The apparatus of claim 1 , wherein the spraying mechanism comprises a spray bar that extends from a first end that overlies the center of the underlying workpiece to a second end that overlies the outer periphery of the underlying workpiece.
4. The apparatus of claim 1 , wherein the spraying mechanism and the barrier plate are made from different materials.
5. The apparatus of claim 4 , wherein the spraying mechanism has a relatively low thermal mass as compared to the barrier plate having a relatively high thermal mass.
6. An apparatus for processing a microelectronic workpiece, comprising:
a) a processing chamber in which the workpiece is positioned during a treatment;
b) a chuck positioned in the processing chamber for holding and supporting the workpiece;
c) a spraying mechanism comprising at least one linear array of nozzle openings through which a fluid material can be dispensed toward the workpiece, wherein the spraying mechanism comprises a bottom surface, a first side surface, and a second side surface; and
d) a barrier plate overlying the workpiece thereby defining a boundary of the processing chamber, said barrier plate having a top surface comprising a pocket that the spraying mechanism fits into, wherein the spraying mechanism is positioned in the pocket, and wherein said pocket comprises:
i) a first portion of the top surface that is in contact with and structurally supports the bottom surface of the spraying mechanism, wherein the first portion comprises at least one aperture through which spray from the spraying mechanism can pass through towards the workpiece;
ii) a second portion of the top surface that is in contact with and structurally supports the first side surface of the spraying mechanism; and
iii) a third portion of the second major surface that is in contact with and structurally supports the second side surface of the spraying mechanism; wherein the spraying mechanism and the barrier plate are separate components.
7. The apparatus of claim 6 , further comprising a retaining plate overlying the spraying mechanism and secured to the barrier plate so as to secure the spraying mechanism in the pocket.
8. The apparatus of claim 6 , wherein the spraying mechanism comprises a spray bar that extends from a first end that overlies the center of the underlying workpiece to a second end that overlies the outer periphery of the underlying workpiece.
9. The apparatus of claim 6 , further comprising a resilient element interposed between the spraying mechanism and the barrier plate.
10. The apparatus of claim 9 , wherein said spraying mechanism has a first rate of thermal expansion, said barrier plate has a second rate of thermal expansion different from the first rate of thermal expansion; and the resilient element is interposed between the spraying mechanism and the barrier plate in a manner effective to help accommodate a difference in the rates of thermal expansion between the spraying mechanism and the barrier plate.