Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
View Patent ↗Apparatuses, and related methods, for processing a workpiece that include a particular barrier structure that can overlie and cover a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular movable member that can be positioned over and moved relative to a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular ceiling structure that can overlie a processing chamber. Nozzle devices, and related methods, that include a particular annular body. Nozzle devices, and related methods, that include a particular first, second, and third nozzle structure.
1. A barrier structure having a lower surface, comprising:
a) an annular body having a lower surface that is angled so as to help define a tapering flow channel over a workpiece surface when the body is positioned over the workpiece surface;
b) a plurality of independent arrays of nozzles integrated within the annular body in a manner effective to permit one or more processing materials to be dispensed in fluid streams that converge externally with each other and flow downward onto the workpiece surface, wherein the lower surface of the barrier structure comprises a first face having a first array of nozzles integrated within the annular body, a second face having a second array of nozzles integrated within the annular body, and an apex region located between the first and second adjacent faces and having a third array of nozzles integrated within the annular body, wherein the first face is adjacent to the second face in an angled manner that permits a fluid to be dispensed from the first array of nozzles and converge externally with a fluid to be dispensed from the second array of nozzles and a fluid to be dispensed from the third array of nozzles, wherein the converged fluid can flow downward onto the workpiece surface; and
c) one or more processing material supply conduits in the annular body through which one or more processing materials can be supplied to the plurality of independent arrays of nozzles.
2. The barrier structure of claim 1 , wherein the flow channel tapers in a radially outward direction relative to said surface of the workpiece.
3. The barrier structure of claim 1 , wherein the annular body comprises an inner periphery defining a central pathway that provides egress between a volume above the annular body and a volume below the annular body, and wherein the barrier structure further comprises an arm structure extending generally across the central pathway.
4. The barrier structure of claim 3 , wherein the arm structure comprises at least one nozzle through which at least one processing material is dispensed.
5. A barrier structure having a lower surface, comprising:
a) an annular body that can overlie and cover a workpiece when the body is positioned over the workpiece;
b) a plurality of independent arrays of nozzles integrated within the annular body in a manner effective to permit one or more processing materials to be dispensed in fluid streams that converge externally with each other and flow downward onto the workpiece surface, wherein the lower surface of the barrier structure comprises a first face having a first array of nozzles integrated within the annular body, a second face having a second array of nozzles integrated within the annular body, and an apex region located between the first and second adjacent faces and having a third array of nozzles integrated within the annular body, wherein the first face is adjacent to the second face in an angled manner that permits a fluid to be dispensed from the first array of nozzles and converge externally with a fluid to be dispensed from the second array of nozzles and a fluid to be dispensed from the third array of nozzles, wherein the converged fluid can flow downward onto the workpiece surface; and
c) one or more processing material supply conduits in the annular body through which one or more processing materials can be supplied to the plurality of independent arrays of nozzles.
6. The barrier structure of claim 1 , wherein the barrier structure comprises at least one pathway providing egress through the barrier structure from a volume above the barrier structure to a volume below the barrier structure.
7. The barrier structure of claim 6 , wherein the pathway generally overlies the workpiece.
8. The barrier structure of claim 5 , wherein the barrier structure comprises at least one pathway providing egress through the barrier structure from a volume above the barrier structure to a volume below the bather structure.
9. The barrier structure of claim 8 , wherein the pathway generally overlies the workpiece.