Patent Assignment
Reel/Frame 023318/0083
Assignment of Assignor's Interest
Recorded: 2009-10-02
Pages: 2
Assignors
NAKADA, TAKAYUKI
Executed: 2009-09-02
MATSUDA, TOMOYUKI
Executed: 2009-09-07
MORITA, SHINYA
Executed: 2009-09-07
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.