Patent Assignment
Reel/Frame 023336/0643
Assignment of Assignor's Interest
Recorded: 2009-10-07
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Maintenance Method Therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.