Patent Assignment
Reel/Frame 023500/0311
Assignment of Assignor's Interest
Recorded: 2009-11-11
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Capacitively-Coupled Electrostatic (Cce) Probe Arrangement for Detecting Dechucking in a Plasma Processing Chamber and Methods Thereof