Patent Assignment
Reel/Frame 023504/0125
Assignment of Assignor's Interest
Recorded: 2009-11-11
Pages: 5
Assignors
SRIVASTAVA, ASEEM K.
Executed: 2009-11-11
DIVERGILIO, WILLIAM F.
Executed: 2009-11-11
GILCHRIST, GLEN R.
Executed: 2009-11-11
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Method and Apparatus for Cleaning Residue from an Ion Source Component
Application:
12/616,662 →
Publication:
US 2011/0108058
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.