Patent Assignment
Reel/Frame 023577/0285
Assignment of Assignor's Interest
Recorded: 2009-11-24
Pages: 3
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Immersion exposure device cleaning method, dummy wafer, and immersion exposure device
Application:
12/588,618 →
Publication:
US 2010/0103392
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.