Patent Assignment
Reel/Frame 023713/0515
Assignment of Assignor's Interest
Recorded: 2009-12-29
Pages: 6
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Pattern Position and Overlay Measurement
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.