Patent Assignment
Reel/Frame 051374/0077
Assignment of Assignor's Interest
Recorded: 2019-12-27
Pages: 3
Assignor
HITACHI, LTD.
Executed: 2019-05-31
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Method and Apparatus for Pattern Position and Overlay Measurement
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.