Patent Assignment
Reel/Frame 023789/0625
Assignment of Assignor's Interest
Recorded: 2010-01-14
Pages: 4
Assignors
HSIEH, WEN-YAO
Executed: 2009-10-26
CHIU, CHE-YU
Executed: 2009-10-26
PENG, ANWEI
Executed: 2009-10-28
CHEN, JIAN-HUNG
Executed: 2009-10-27
WU, HSUEH-CHEN
Executed: 2009-10-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Improved Automated Semiconductor Wafer Manufacturing