Assignment of Assignor's Interest

Recorded: 2010-01-19 Pages: 2

Assignor

DEGUENTHER, MARKUS

Executed: 2010-01-18

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination Device of a Microlithographic Projection Exposure Apparatus, and Microlithographic Projection Exposure Method

Application: 12/637,889 →

Publication: US 2010/0149504

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.